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Canon launches nanoimprint semiconductor manufacturing equipment

Canon launches nanoimprint semiconductor manufacturing equipment

2023-05-26

Companies such as Kaoxia, Canon and Nippon Printing are the main drivers of this technology path, and are working together to develop and plan to put the technology into practical use by 2025. Nikkei News previously said that compared with the EUV lithography process, the use of nanoimprint lithography to manufacture chips can reduce manufacturing costs by nearly 40% and power by 90%.


What exactly is nanoimprint black technology? Can replace complex optical lithography?


The data show that nanoimprint is a kind of micro and nano processing technology, which adopts the principle of micro replication of traditional mechanical molds. In simple terms, traditional lithography devices transfer circuit patterns by projecting them onto a resist coated wafer, while nanoimprint lithography chips imprint a mask printed with circuit patterns onto an resist on the wafer, like a stamp on a plasticine, and then release a chip.


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